真空安全阀 VSM DN16 - DN100
- 快速关闭高真空隔离阀用于将真空室和前级泵隔离
- 排气阀用于低真空泵
- 出现电源故障时立即关闭
- 仅在进气管中的气体排空后打开
电源故障排气阀 VIM010-A
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - VSM DN 16-DN 100 (siba33e1.pdf)
English
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Operating Manual Saftey Valves, VSM016 040-A (sima32e1.pdf)
English
| German
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Operations and Maintenance Manuals:
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Instruction Sheet - VSM016 ... 040-AA, Safety Valves, (sima82e1_b.pdf)
English
| German
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Operating Manual - VSM016 ... 040-A, Safety Valves, (sina32e1.pdf)
English
| German
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Operating Manual Safety Valves, VSM016 ... 040-AA, (sina82e1.pdf)
English
| German
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