Inficon





Worldwide


Semiconductor

Products:


> 带有 FabGuard 的射频传感技术
> 检漏仪
> 残余气体分析仪
> 真空元件
> 真空计
> 真空阀和气体计量系统
 
•  All-Metal Angle Valves, DN 16 - 63
•  Angle Valves
•  Angle and Inline Valves, DN 16 - 160
•  Angle and Inline Valves, DN 5
•  Ball Valves, DN 10-40
•  Butterfly Valves, DN 63 to 250 ISO
•  Diaphragm Valves, Manually Actuated
•  Gas Dosing Systems
•  Gas Dosing Valves
•  Pressure Relief Valve
•  Safety Valves
•  Venting Valves
   
> 集成式过程监控
> FabGuard 软件套件



气体计量阀

手动粗气体计量阀 VDH010-A
  • 允许可再现的气流进入真空室

手动计量和切断阀 VDH016-X
  • 宽广的控制范围
  • 最佳控制特性
  • 数字显示
  • 卓越的再现性
  • 内置切断阀
  • 关闭后不会更改流设定

全金属计量阀和系统 VDH040-U / VDE040-U / VCE500
  • 最小无用容积
  • 使用毛细管控制气流流经路线
  • 工作温度为 200 o C
  • 总压或气流控制
  • 与 VDE40-U 和 VCE500 结合使用,实现自动控制

QUESTIONS? Contact your local representative, click here.

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Datasheet - VDH010-A (siba25e1.pdf)
English

   Datasheet - VDH016-X (siba26e1.pdf)
English

Operations and Maintenance Manuals:

   Instruction Sheet - VDH040-U (sima03e1.pdf)
English | German

   Operating Manual - VDH010-A (sina68e1.pdf)
English | German

   Operating Manual - VDH016-X (sina64e1.pdf)
English | German

Request Further Information from Inficon.
REQUEST INFO. I'd like additional information, click here.


Contact your local representative.


GOT A SHOT? Send us your photo of an INFICON product at work. We'll send you a very cool gift!