Inficon





Worldwide


Semiconductor
>    真空阀和气体计量系统    >   All-Metal Angle Valves, DN 16 - 63   

Products:

> 带有 FabGuard 的射频传感技术
> 检漏仪
> 残余气体分析仪
> 真空元件
> 真空计
> 真空阀和气体计量系统
 
•  All-Metal Angle Valves, DN 16 - 63
•  Angle Valves
•  Angle and Inline Valves, DN 16 - 160
•  Angle and Inline Valves, DN 5
•  Ball Valves, DN 10-40
•  Butterfly Valves, DN 63 to 250 ISO
•  Diaphragm Valves, Manually Actuated
•  Gas Dosing Systems
•  Gas Dosing Valves
•  Pressure Relief Valve
•  Safety Valves
•  Venting Valves
   
> 集成式过程监控
> FabGuard 软件套件



全金属角阀，DN 16 - 63
标准
  • 适用于 UHV 和 HV 应用
  • 开和关位置下，均可在高达 180 o C 温度下烘烤
  • FPM 密封件
  • 免维护

全金属
  • 适用于 UHV 应用
  • 开和关位置下，均可在高达 300 o C 温度下烘烤
  • 铜密封件
  • 免维护

 QUESTIONS? Contact your local representative, click here.

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Datasheet - VAH DN16-63 CF-R (siba18e1_b.pdf)
English

   Instruction Sheet - VAH016-U, VAH040-U, VAH063-U (sima01e1-a.pdf)
English | German

   Instruction Sheet - VAH016-Z, VAH040-Z, VAH063-Z (sima02e1.pdf)
English | German

   Operating Manual - VAH016-U, VAH040-U, VAH063-U (sina01e1-a.pdf)
English | German

   Operating Manual - VAH016-z, VAH040-Z, VAH063-Z (sina02e1.pdf)
English | German

Request Further Information from Inficon.
 REQUEST INFO. I'd like additional information, click here.


CALL TO ORDER
Contact your local representative.


GOT A SHOT? Send us your photo of an INFICON product at work. We'll send you a very cool gift!