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> Integrated Process Monitoring
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> Residual Gas Analyzers
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems
 
•  All-Metal Angle Valves, DN 16 - 63
•  Angle Valves
•  Angle and Inline Valves, DN 16 - 160
•  Angle and Inline Valves, DN 5
•  Ball Valves, DN 10-40
•  Butterfly Valves, DN 63 to 250 ISO
•  Diaphragm Valves, Manually Actuated
•  Gas Dosing Systems
•  Gas Dosing Valves
•  Pressure Relief Valve
•  Safety Valves
•  Venting Valves
   



Vacuum Valves and Gas Dosing Systems
蝶閥 - DN 63 至 250 ISO

真空閥和氣體計量系統


爲滿足真空應用的所有要求，INFICON 提供了一整套真空閥、配件和饋入件。我們的定制加熱閥和配件專爲半導體製造業的蝕刻排氣生産綫而設計。INFICON 氣體計量控制器通過與 INFICON 真空計的互通實現對壓力的控制。

INFICON 元件 100% 通過 1 X10-9 mbar-l-s 以下的泄漏檢測。表面加工、焊接和材料規格滿足或超出高真空要求。INFICON 閥、配件和饋入件可選擇不銹鋼或鋁質，法蘭設計符合國際標準 ISO 2861、ISO 1609 和 ISO 3669。

蝶閥 - DN 63 至 250 ISO
角閥和直通閥- DN 10 - 250
角閥和直通閥- DN 200 - 1000
角閥和直通閥- DN 5
氣體計量系統
安全閥
排氣閥
相關技術信息

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