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Semiconductor
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Vacuum Valves and Gas Dosing Systems
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Safety Valves
Products:
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FabGuard Software Suite
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Integrated Process Monitoring
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Vacuum Valves and Gas Dosing Systems
•
All-Metal Angle Valves, DN 16 - 63
•
Angle Valves
•
Angle and Inline Valves, DN 16 - 160
•
Angle and Inline Valves, DN 5
•
Ball Valves, DN 10-40
•
Butterfly Valves, DN 63 to 250 ISO
•
Diaphragm Valves, Manually Actuated
•
Gas Dosing Systems
•
Gas Dosing Valves
•
Pressure Relief Valve
•
Safety Valves
•
Venting Valves
Safety Valves
Vacuum Safety Valves VSM DN16 - DN100
Fast-closing high vacuum isolation valve for separating the vacuum chamber from the backing pump
Venting valve for roughing pumps
Immediate closing action upon power failure
Opening action only after the intake line has been evacuated
Power Failure Venting Valve VIM010-A
For automatic venting of pumps, system or vacuum chambers in case of a power failure
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ASSOCIATED TECHNICAL INFORMATION
Datasheet - VSM DN 16-DN 100 (siba33e1.pdf)
English
Instruction Sheet - VSM016 ... 040-AA, Safety Valves, (sima82e1_b.pdf)
English
|
German
Operating Manual - VSM016 ... 040-A, Safety Valves, (sina32e1.pdf)
English
|
German
Operating Manual Safety Valves, VSM016 ... 040-AA, (sina82e1.pdf)
English
|
German
Operating Manual Saftey Valves, VSM016 … 040-A (sima32e1.pdf)
English
|
German
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