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Semiconductor

Products:


> リーク感知機
> 残留ガス分析器
> 真空バルブとガス注入システム
 
•  All-Metal Angle Valves, DN 16 - 63
•  Angle Valves
•  Angle and Inline Valves, DN 16 - 160
•  Angle and Inline Valves, DN 5
•  Ball Valves, DN 10-40
•  Butterfly Valves, DN 63 to 250 ISO
•  Diaphragm Valves, Manually Actuated
•  Gas Dosing Systems
•  Gas Dosing Valves
•  Pressure Relief Valve
•  Safety Valves
•  Venting Valves
   
> 真空計
> 真空部品
> 統合プロセス監視
> FabGuaradソフトウェア適応
> FabGuardでRFセンシングテクノロジー



*圧力除去バルブ VSA016-X
利点
  • >1.5barの圧力から真空システムを保護
  • 開放トリガーポイントは1.2から1.5bar絶対単位

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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Datasheet - VSA016-X (siba35e1.pdf)
English

   Operating Manual - VSA016-X (sina62e1.pdf)
English | German

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