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Semiconductor
>
Vacuum Valves and Gas Dosing Systems
>
All-Metal Angle Valves, DN 16 - 63
Products:
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FabGuard Software Suite
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Vacuum Valves and Gas Dosing Systems
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All-Metal Angle Valves, DN 16 - 63
•
Angle Valves
•
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•
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•
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Venting Valves
All-Metal Angle Valves, DN 16 - 63
Standard
For UHV and HV applications
Bakeable at up to 180
0
C in open and closed position
FPM sealed
Maintenance-free
All-metal
For UHV applications
Bakeable at up to 300
0
C in open and closed position
Copper sealed
Maintenance-free
QUESTIONS?
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ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
Datasheet - VAH DN16-63 CF-R (siba18e1_b.pdf)
English
Instruction Sheet - VAH016-U, VAH040-U, VAH063-U (sima01e1-a.pdf)
English
|
German
Instruction Sheet - VAH016-Z, VAH040-Z, VAH063-Z (sima02e1.pdf)
English
|
German
Operating Manual - VAH016-U, VAH040-U, VAH063-U (sina01e1-a.pdf)
English
|
German
Operating Manual - VAH016-z, VAH040-Z, VAH063-Z (sina02e1.pdf)
English
|
German
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