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Vacuum Valves and Gas Dosing Systems
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INFICON offers a complete line of vacuum valves, fittings and feedthroughs to meet all your vacuum applications. Our custom heated valves and fittings are specially designed for the etch exhaust lines of semiconductor manufacturing. INFICON gas-dosing controller controls pressure by communicating with INFICON vacuum gauges.
INFICON components are 100% leak tested to less than 1 X10-9 mbar-l-s. Surface finish, welds, and material specifications meet or exceed high vacuum requirements. INFICON valves, fittings and feedthroughs are available in stainless steel and aluminum and our flange design is in accordance with international standards ISO 2861, ISO 1609, and ISO 3669.
Angle and Inline Valves, DN 16 - 160
Angle and Inline Valves, DN 5
All-Metal Angle Valves, DN 16 - 63
Diaphragm Valves, Manually Actuated
Ball Valves, DN 10-40
Butterfly Valves, DN 63 to 250
Gas Dosing Valves
Gas Dosing Systems
Vacuum Safety Valves
Pressure Relief Valve
Venting Valves
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Vacuum Control Catalog
See our full line
of vacuum gauges and accessories.
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