Inficon





Worldwide


Semiconductor
>    Vacuum Valves and Gas Dosing Systems    >   Gas Dosing Valves   

Products:

> FabGuard Software Suite
> Integrated Process Monitoring
> Leak Detectors
> RF Sensing Technology with FabGuard
> Residual Gas Analyzers
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems
 
•  All-Metal Angle Valves, DN 16 - 63
•  Angle Valves
•  Angle and Inline Valves, DN 16 - 160
•  Angle and Inline Valves, DN 5
•  Ball Valves, DN 10-40
•  Butterfly Valves, DN 63 to 250 ISO
•  Diaphragm Valves, Manually Actuated
•  Gas Dosing Systems
•  Gas Dosing Valves
•  Pressure Relief Valve
•  Safety Valves
•  Venting Valves
   



Gas Dosing Valves
Manually Actuated Coarse Gas Dosing Valve VDH010-A
  • For admitting a reproducible flow of gas into a vacuum chamber

Manually Actuated Dosing and Shut-off Valve VDH016-X
  • Very wide control range
  • Optimal control characteristics
  • Digital display
  • Excellent reproducibility
  • Integrated shut-off valve
  • Closing without change of flow setting

All-Metal Dosing Valves and System VDH040-U / VDE040-U / VCE500
  • Minimal dead volume
  • Controlled routing of the gas flow using capillaries
  • Operating temperature 200 o C
  • Control of total pressure or gas flow
  • Automatic control in conjunction with VDE40-U and VCE500

 QUESTIONS? Contact your local representative, click here.

ASSOCIATED TECHNICAL INFORMATION

   Datasheet - VDH010-A (siba25e1.pdf)
English

   Datasheet - VDH016-X (siba26e1.pdf)
English

   Instruction Sheet - VDH040-U (sima03e1.pdf)
English | German

   Operating Manual - VDH010-A (sina68e1.pdf)
English | German

   Operating Manual - VDH016-X (sina64e1.pdf)
English | German

Request Further Information from Inficon.
 REQUEST INFO. I'd like additional information, click here.


CALL TO ORDER
Contact your local representative.


GOT A SHOT? Send us your photo of an INFICON product at work. We'll send you a very cool gift!