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>Vacuum Valves and Gas Dosing Systems

Angle (VAP) and Inline (VIP) Pneumatic and Electropneumatic Actuated Valves


The INFICON ISO-KF valve line, VAP / VIP016...040-A/X, performs as a gauge isolation, bypass, rough or venting valve and is well suited for all general high vacuum and semiconductor processes. The improved industrial design results in a rugged, compact, highly reliable valve with a low cost of ownership. The All-in-One concept means the valve is fast and easy to install and the pilot valve and electrical position indicator are integrated for convenient "plug and play" use. The proven All-in-One design and extremely long service life make this valve easy to maintain. The new line is fully compatible with the current INFICON VAP / VIP016...040-A/X valve line.

Features / Benefits
  • All-in-One design for fast and easy installation; one connector for pilot valve and electrical position indicator for easiest "plug and play"
  • Direct pneumatic actuation or via integrated pilot valve
  • Normally open and normally closed versions available
  • Electrical and visual position indicator, standard
  • 10 million cycle 316L stainless steel bellows
  • Easy maintenance, fast bellows and seal replacement
  • Fast opening and closing time
  • High conductance for fast pump down or venting
  • High differential pressure resistance
  • FPM sealing standard, other sealing materials available upon request
  • High purity aluminum or stainless steel housing

INFICON also offers a full line of ISO-KF manually actuated valves. Click here for more information.

 Datasheet - Angle (VAP) and Inline (VIP) Valves, Pneumatically Actuated (siba39e1-b.pdf)
 Datasheet - Angle (VAP) and Inline (VIP) Valves, Pneumatically Actuated (siba44e1-a.pdf)
 Gebrauchsanleitung - VAP Eckventil und VIP Inline-Ventil (sina98d1_a.pdf)
 Operating Manual - VAP Angle and VIP Inline Valves (sina98e1_a.pdf)

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